Yttrium oxyfluoride
Yttrium oxyfluoride is an inorganic chemical compound with the formula YOF.[1] Under normal conditions, the compound is a colorless solid.[2]
| Identifiers | |
|---|---|
| Properties | |
| FOY | |
| Molar mass | 123.903 g·mol−1 |
| Appearance | white powder |
| Density | 5.18 g/cm³ |
| Structure | |
| tetragonal | |
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa). | |
| Infobox references | |
Synthesis
- The decomposition of crystalline hydrate of yttrium fluoride upon heating (900 °C) in a vacuum:
- 2YF
3 * 1/2H
2O → YOF + YF
3 + 2HF
- Hydrolysis of yttrium fluoride with superheated steam (800 °C):
- YF
3 + H
2O → YOF + 2HF
Properties
Yttrium oxyfluoride forms colorless crystals of tetragonal crystal system; its cell parameters are: a = 0.3910 nm, c = 0.5431 nm. According to hexagonal crystal family, the cell parameters are: a = 0.38727 nm, c = 1.897 nm, Z = 6.
Applications
Stable yttrium oxyfluoride material is used for inner walls of plasma process equipment.[3][4]
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References
- Mann, A. W.; Bevan, D. J. M. (1970). "The crystal structure of stoichiometric yttrium oxyfluoride, YOF". Acta Crystallographica. B26 (12): 2129–2131. doi:10.1107/S0567740870005496. Retrieved 16 June 2017.
- Рипан, Р.; Четяну, И. (1992). Неорганическая химия (in Russian).
- Shiba, Yoshinobu (January 2017). "Stable yttrium oxyfluoride used in plasma process chamber". Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 35 (2): 021405. doi:10.1116/1.4975143.
- Tsunoura, Toru; Yoshida, Katsumi; Yano2, Toyohiko; Kishi, Yukio (2 May 2017). "Fabrication, characterization, and fluorine-plasma exposure behavior of dense yttrium oxyfluoride ceramics". Japanese Journal of Applied Physics. 56 (6S2): 06HC02. Bibcode:2017JaJAP..56fHC02T. doi:10.7567/JJAP.56.06HC02.
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