Tetrakis(trimethylsilyloxy)silane

Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound with the formula Si[OSi(CH3)3]4. This colourless liquid is used as a reagent in organic synthesis.[2]

Tetrakis(trimethylsilyloxy)silane
Identifiers
Abbreviations TTMS
UNII
Properties
C12H36O4Si5
Molar mass 384.841 g·mol−1
Appearance Colourless liquid
Density 0.87 g cm−3[1]
Melting point −60 °C (−76 °F; 213 K)
Boiling point 103–106 °C (217–223 °F; 376–379 K)
Vapor pressure 8.96 Pa (25°C)
1.389
Hazards
Xi
Flash point 80 °C (176 °F; 353 K)
Related compounds
Related compounds
Hexamethyldisiloxane

Octamethylcyclotetrasiloxane

Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Infobox references

Application

TTMS can be used for thin film coating with a nanostructured silicon dioxide prepared by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure.[3]

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References

  1. "Chemical Book".
  2. Fleming, I (2002). Science of Synthesis: Houben-Weyl Methods of Molecular Transformations. Stuttgart: Georg Thieme Verlag. p. 1060. ISBN 3-13-112171-8.
  3. Schäfer, J; Hnilica, J; Sperka, J; Quade, A; Kudrle, V; Foest, R; Vodak, J; Zajickova, L (2016). "Tetrakis(trimethylsilyloxy)silane for nanostructured SiO2-like films deposited by PECVD at atmospheric pressure". Surface & Coatings Technology. 295 (295): 112–118. doi:10.1016/j.surfcoat.2015.09.047.
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